AMEC’s Primo nanova® ICP etch system
Caption AMEC’s Primo nanova® ICP etch system
Source Advanced Micro-Fabrication Equipment Inc.
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AMEC Introduces the Primo Nanova(R) System - Company's First ICP Etch Product for Chipmakers' most Advanced Memory and Logic Device Designs
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AMEC, 최첨단 반도체 메모리와 로직디바이스 제조용으로 자사 최초의